| 摘要 |
PROBLEM TO BE SOLVED: To simultaneously collect composition data and form data by one device in an X-ray analyzer, and display the composition data and the surface form data on the same map. SOLUTION: This X-ray analyzer has an electron beam emitting device 1; an X-ray spectroscope 2 for detecting the X-ray intensity; an X, Y-stage device for automatically scanning a sample stage 3 in X, Y-directions; and a Z-stage device 5 for making a sample surface follow the focal position of the X-ray spectroscope 2 in Z-direction, the X, Y-stage device 4 automatically scans in X, Y-directions, and the Z-stage device makes the sample stage follow in Z-direction according to the irregularities of the sample surface so that the sample surface is situated in the focal position of the X-ray spectroscope 2. The surface form data of the sample is determined from the X, Y-coordinate of the X, Y-stage device 4 and the Z-coordinate by the movement of the Z-stage device 5. The composition data of the sample is collected by the X-ray intensity measurement of characteristic X-ray by the X-ray spectroscope 2. Thus, the composition data and the surface form data are simultaneously obtained by one device, and the composition data and the three-dimensional map of the surface form data are displayed on the same map. |
