发明名称 DIE TRANSFERRING APPARATUS
摘要 PROBLEM TO BE SOLVED: To shorten the die transferring time and to improve the productivity by providing the support shaft of two upper and lower swing levers at the inside in the horizontal direction perpendicular to the extending direction of a transferring guide member. SOLUTION: Suction nozzle upward and downward moving means 25A, 25B have two upward and downward swing levers 41 for vertically moving a slider 52, a vertically driving cam 29 for rotating the lever 41, and a vertically driving motor for rotating the cam 29. The shafts 40 of the rotating centers of the two levers 41 are disposed in the horizontal direction (Y direction) perpendicular to the extending direction (X direction) of transferring guide shaft 44, and provided at the inside. Thus, the time transferring time can be shortened, thereby improving the productivity.
申请公布号 JPH0964068(A) 申请公布日期 1997.03.07
申请号 JP19950232111 申请日期 1995.08.18
申请人 SHINKAWA LTD 发明人 NAKAMURA OSAMU;ARAI TSUNEHARU
分类号 H01L21/00;H01L21/50;H01L21/52;H01L21/67;H01L21/677;(IPC1-7):H01L21/50;H01L21/68 主分类号 H01L21/00
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