| 摘要 |
PROBLEM TO BE SOLVED: To improve alignment accuracy without reducing speed by using an X direction motor and a Y direction motor which have low moving resolution as a linear scale and aligning a table by permitting the error to be minimum from the four deviations of first/second stopped positions from the correct positions. SOLUTION: The resolution of the linear scales 6 and 7 in the X and Y directions is permitted to be higher than the moving resolution of motors 4 and 5 for both directions. A controller 16 permits the motors 4 and 5 for both directions to operate in order to shift a substrate 2, which is placed on a placing table 3 by previous input, to a first position directly below a first camera 15, and a bonding tool 12 to a second position directly above the second camera, the deviation of the stopped position from the correct position is detected by both linear scales each time and the X and Y directions and the rotation angle of the bonding tool 12 are modified from the four deviations so as to permit the deviation to be minimum. Thus, highly accurate alignment is achieved without reducing speed. |
