METALLIC WIRING FORMATION METHOD,申请号JP19950243649-传众专利搜索

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发明名称	METALLIC WIRING FORMATION METHOD
摘要
申请公布号	JPH0964287(A)	申请公布日期	1997.03.07
申请号	JP19950243649	申请日期	1995.08.29
申请人	HITACHI LTD	发明人	TOMOBE KATSUICHI
分类号	H01L23/52;H01L21/3205;H01L21/822;H01L27/04;(IPC1-7):H01L27/04;H01L21/320	主分类号	H01L23/52
代理机构		代理人
主权项
地址

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