CONTAINER FOR HOUSING SEMICONDUCTOR WAFERS, STRUCTURE FOR HOUSING SEMICONDUCTOR WAFERS, AND METHOD OF PUTTING IN AND TAKING OUT SEMICONDUCTOR WAFERS

摘要

A container which is exclusively used for housing semiconductor wafers and adapted to automatic control mechanisms (namely, robots). A structure for housing semiconductor wafers and method for housing and taking out semiconductor wafers by which breakage of semiconductor wafers caused by shocks and generation of static electricity due to friction are prevented. The container comprises a main body including a cylindrical portion in which semiconductor wafers are housed in a stack with spacer sheets interposed in between and a cap body which is put on the main body. In the structure, semiconductor wafers are housed in the main body of a container in a stack with spacer sheets interposed in between.