| 摘要 |
<p>A precision-controlled slit mechanism having an adjustable width which is both accurate and reproducible is provided for apparatuses which are designed to exclude portions of an energy spectrum prior to analysis such as energy-selected imaging filters in electron microscopes. The slit mechanism (10) includes a pair of slit halves (12, 14), a light source (11) for directing light between the slit halves, a detector (16) for measuring the intensity of light passing from the light source through the slit halves, and an actuator (26) for adjusting the width of the opening between the slit halves in response to the intensity of light measured by the detector.</p> |
