发明名称 Verfahren zum Messen sehr kleiner Verunreinigungen eines Gases
摘要 A method capable of accurately and inexpensively measuring a very small quantity of impurities, such as water, contained in chemical substances, which are gaseous at normal temperature and pressure, is provided. A concentration of a very small quantity of impurities, such as water, contained in said chemical substances, which are gaseous at normal temperature and pressure, is measured by introducing the chemical substances into a cell under the condition of liquefied gases to measure an electric conductivity of said liquefied gases. <IMAGE>
申请公布号 DE69216921(D1) 申请公布日期 1997.03.06
申请号 DE1992616921 申请日期 1992.06.05
申请人 OHMI, TADAHIRO, SENDAI, MIYAGI, JP;NIPPON SANSO CORP., TOKIO/TOKYO, JP;HORIBA LTD., KYOTO, JP 发明人 OHMI, TADAHIRO, SENDAI-CITY, MIYAGI-PREFECTURE, JP;ISHIHARA, YOSHIO, TSUCHIURA-CITY, IBARAKI-PREFECTURE, JP;FUKUSHIMA, RYOSUKE, FUNAI-GUN, KYOTO, JP
分类号 G01N27/04;G01N27/06;G01N27/07;H01L21/302;(IPC1-7):G01N27/06 主分类号 G01N27/04
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