发明名称 METHOD FOR FORMING A METALLIC OR CERAMIC DEPOSITION COATING
摘要 A method for coating a metallic or ceramic substrate (15) with a complex metallic or ceramic material from two or more organometallic precursors by chemical vapour deposition includes decomposing the two organometallic precursors by sublimation in two separate crucibles (16) in a reactor (6) into which a suitable gas is fed, while simultaneously rotating said substrates (15) above the two crucibles (16), and reacting these components at the surface of the substrate, heated to a temperature of about 650 DEG to 850 DEG C. Each of the precursors is sublimated at a suitable temperature according to the desired proportion of the two components in the coating.
申请公布号 WO9708360(A1) 申请公布日期 1997.03.06
申请号 WO1996IB00824 申请日期 1996.08.22
申请人 M3D SOCIETE ANONYME;AGULLO, JEAN-MARC;TOUANEN, MURIEL;RICHON, DOMINIQUE 发明人 AGULLO, JEAN-MARC;TOUANEN, MURIEL;RICHON, DOMINIQUE
分类号 C23C16/32;C23C16/36;C23C16/44;C23C16/448 主分类号 C23C16/32
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