发明名称 |
METHOD FOR FORMING A METALLIC OR CERAMIC DEPOSITION COATING |
摘要 |
A method for coating a metallic or ceramic substrate (15) with a complex metallic or ceramic material from two or more organometallic precursors by chemical vapour deposition includes decomposing the two organometallic precursors by sublimation in two separate crucibles (16) in a reactor (6) into which a suitable gas is fed, while simultaneously rotating said substrates (15) above the two crucibles (16), and reacting these components at the surface of the substrate, heated to a temperature of about 650 DEG to 850 DEG C. Each of the precursors is sublimated at a suitable temperature according to the desired proportion of the two components in the coating. |
申请公布号 |
WO9708360(A1) |
申请公布日期 |
1997.03.06 |
申请号 |
WO1996IB00824 |
申请日期 |
1996.08.22 |
申请人 |
M3D SOCIETE ANONYME;AGULLO, JEAN-MARC;TOUANEN, MURIEL;RICHON, DOMINIQUE |
发明人 |
AGULLO, JEAN-MARC;TOUANEN, MURIEL;RICHON, DOMINIQUE |
分类号 |
C23C16/32;C23C16/36;C23C16/44;C23C16/448 |
主分类号 |
C23C16/32 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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