A SCANNING PROBE MICROSCOPE HAVING AUTOMATIC PROBE EXCHANGE AND ALIGNMENT

摘要

A scanning probe microscope and method having automated exchange and precise alignment of probe, wherein one or more additional stored probes (4) for installation onto a probe mount (32) are stored in a storage cassette (22) or a wafer, a selected probe is aligned to a detection system (11), and the aligned probe is then clamped against the probe mount. Clamping is performed using a clamp (68) which is disabled when removing a replacement probe from the storage cassette, enabled when installing the probe on the probe mount and disabled when releasing the probe at a later time for subsequent probe exchange. Probe alignment is automated using signal from the probe detection system or by determining probe positioning using pattern recognition processing of the probe image to allow probe removal and exchange without operator intervention. Techniques for error checking are employed to ensure proper probe installation and operation.