| 摘要 |
PROBLEM TO BE SOLVED: To provide an optical module formed by fixing an optical waveguide body, such as optical fiber, to a base plate without interposing an adhesive or solder material. SOLUTION: A rectangular groove 38 having groove wall surfaces for positioning the end faces of the optical fiber 34 is formed. The optical fiber 34 is placed on the metallized film 41 on an Si substrate 31. The metallized film 41 and the metallized film 42 are brought into contact with each other and the end face of the optical fiber 34 is partly brought into contact with the rectangular groove 38, by which the optical fiber 34 is positioned. Either of the Si substrate 31 and the optical fiber 34 is pressed to the other by a bonding tool in the state of heating the optical fiber, by which the boundary energy of the surface of the metallized film 41 and the surface of the metallized film 42 is increased to diffuse the metal atoms of both metallized films to each other, by which both metallized films are joined to each other. The optical fiber 34 is thereby fixed to the Si substrate 31, by which the optical module formed by fixing the optical fiber 34 to the substrate without interposing adhesives or solder material is obtd. |
