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摘要
申请公布号
JP2588293(B2)
申请公布日期
1997.03.05
申请号
JP19900048127
申请日期
1990.02.28
申请人
TOKYO SHIBAURA ELECTRIC CO
发明人
KIKUCHI MAKOTO;FUKAZAWA MIHARU;ISHIHARA HIDEO
分类号
C23C14/34;C23C14/14;(IPC1-7):C23C14/34
主分类号
C23C14/34
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