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发明名称
SEMICONDUCTOR INTEGRATED CIRCUIT DEVICE FABRICATION PROCESS
摘要
申请公布号
KR970002267(B1)
申请公布日期
1997.02.27
申请号
KR19920017909
申请日期
1992.09.30
申请人
SEMICONDUCTOR ENERGY LABORATORY KK.
发明人
YAMAZAKI, SHUNPEI;MASE, AKIRA;UOCHI, HIDEKI;TAKEMURA, YASUHIKO
分类号
H01L21/336;H01L29/78;(IPC1-7):H01L29/78
主分类号
H01L21/336
代理机构
代理人
主权项
地址
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