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发明名称
Projektionsvorrichtung und Verfahren zur Projektion eines Negativs
摘要
申请公布号
DE3313111(C2)
申请公布日期
1997.02.27
申请号
DE19833313111
申请日期
1983.04.12
申请人
CANON K.K., TOKIO/TOKYO, JP
发明人
SATO, HIROSHI, TOKYO, JP;YABU, SHUICHI, KAWASAKI, KANAGAWA, JP;KOSUGI, MASAO, YOKOHAMA, KANAGAWA, JP
分类号
G03B27/32;G02B7/36;G03B27/34;G03F7/20;G03F7/207;G03F9/00;H01L21/027;H01L21/30;(IPC1-7):G03F7/207
主分类号
G03B27/32
代理机构
代理人
主权项
地址
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