发明名称 SEED CRYSTAL FOR GROWING MONOCRYSTALS, USE OF THE SEED CRYSTAL AND PROCESS FOR PRODUCING SiC MONOCRYSTALS OR MONOCRYSTALLINE SiC LAYERS
摘要 A first partial region (4) of the surface (3) of the seed crystal (2) is the crystallisation area for the monocrystal (6) grown by epitaxy from a gas phase and a second partial region (5) has a coating (7) which is chemically resistant to the seed crystal (2) and the gas phase and does not melt at the growing temperatures. This prevents thermal degradation on the seed crystal (2) and improves the quality of the monocrystal (6) produced.
申请公布号 WO9707265(A1) 申请公布日期 1997.02.27
申请号 WO1996DE01152 申请日期 1996.06.27
申请人 SIEMENS AKTIENGESELLSCHAFT;VOELKL, JOHANNES;STEIN, RENE 发明人 VOELKL, JOHANNES;STEIN, RENE
分类号 C30B23/00;C30B23/02;C30B23/04;C30B25/02;C30B25/18;C30B29/36 主分类号 C30B23/00
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