| 摘要 |
<p>An apparatus (1) for the spin coating of substrates comprising: means for carrying a substrate (28); motor means (26) for rotating said substrate carrier means (24); a spinning bowl (22) surrounding said substrate carrier means (24); and aperture means (20) at least partially covering said spinning bowl (22) for diminishing the escape of fumes into the ambient atmosphere during the spin coating of a substrate (28) carried by said substrate carrier means (24).</p> |
