A suction pad comprises a workpiece attracting section made of a metallic material and brought to contact with a surface of a workpiece; a main body made of a flexible material and integrally coupled to the workpiece attracting section; an adapter made of a metallic material and attached to the main body; and a spring member made of a metallic material with one end thereof connected to the workpiece attracting section and the other end thereof connected to the adapter. A rotation-stop and guide mechanism for a suction pad comprises a spline shaft having splines and coupled to the suction pad, a cylindrical member externally fitted to the spline shaft and displaceable along the spline shaft, and a plurality of balls arranged between the cylindrical member and the spline shaft, the balls forming a rotation-stop in cooperation with the splines that stops the rotation of the cylindrical member against the spline shaft, rolling upon displacement of the cylindrical member along the spline shaft.
