| 摘要 |
<p>A monolithic pressure transducer has a plurality of capacitive sensors (CR,CA,CS). The capacitors are formed from the same silicon substrate and are equally affected by temperature variations, including temperature gradients. The capacitive sensors respectively sense temperature, absolute pressure, and differential pressure. A mode state machine (100) sequences the measurement of the capacitors under the control of a microprocessor (24) which forms the ratios between measurements from the temperature-sensing capacitor and each of the other two capacitors. The capacitors have a common electrode (89) which has portions forming diaphragms (80,94) associated with the absolute and differential pressure-sensing capacitors. <IMAGE></p> |
