| 摘要 |
PURPOSE:To manufacture a multilayer superconducting coil by a method wherein the first oxide superconducting material is formed on a substrate in band-like shape, the material of non-superconducting characteristics, having the element constituting an oxide superconducting material as the main ingredient, covering the above- mentioned first oxide superconducting material, is laminated on the superconducting material, and the second oxide superconducting material, having the same main ingredient as the first superconducting material, is formed in band-like shape. CONSTITUTION:The oxide non-superconducting film 1 containing one or plural kinds of elements is formed on a substrate 1, and a thin film consisting of an oxide superconducting material 2 of the prescribed thickness is formed on the upper surface of the substrate. Then, a groove 3 is formed by scanning a laser beam 4 from the end part to the center part while the substrate 1 is being rotated. Besides, an interlayer insulation film 6 is formed using the oxide non-superconducting material containing one or plural kinds of elements. Also, a superconducting film is formed on the isolation film 6 using the second oxide superconducting material 7 containing one or plural kinds of elements. The region 5 made of the first superconducting material showing a superconducting state is left, and a multilayer superconducting coil is manufactured. |
