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发明名称
Versatile coating deposition system
摘要
申请公布号
GB9700158(D0)
申请公布日期
1997.02.26
申请号
GB19970000158
申请日期
1997.01.07
申请人
GENCOA LIMITED
发明人
分类号
C23C14/35;H01J37/34
主分类号
C23C14/35
代理机构
代理人
主权项
地址
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