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发明名称
摘要
申请公布号
JP2527460(Y2)
申请公布日期
1997.02.26
申请号
JP19930055161U
申请日期
1993.09.18
申请人
发明人
分类号
C30B23/08;C23C14/24;C23C16/44;C23C16/448;H01L21/203;(IPC1-7):C30B23/08
主分类号
C30B23/08
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