发明名称 EPITAXIAL WAFER
摘要 PROBLEM TO BE SOLVED: To provide an epitaxial wafer whose shape is based on both economical efficiency and practicability. SOLUTION: A square epitaxial wafer 1, for an LED, is composed of a single hetero (SH) structure or a double hetero (DH) structure which is formed by epitaxially growing GaAlAs on a GaAs substrate. The epitaxial wafer is featured by rectilinear corners 4 formed at four corners.
申请公布号 JPH0955345(A) 申请公布日期 1997.02.25
申请号 JP19950226981 申请日期 1995.08.14
申请人 HITACHI CABLE LTD 发明人 NOGUCHI MASAHIRO;KIKUCHI YUKIO;MARUYAMA TAKATOSHI
分类号 H01L21/02;H01L21/20;H01L33/30 主分类号 H01L21/02
代理机构 代理人
主权项
地址