LAMINATING DEVICE AND LAMINATING METHOD WITH CONTROLLED ATMOSPHERE AND PRESSURE

摘要

PROBLEM TO BE SOLVED: To control the volume of a gas entrained at high speed during lamination by providing a means for controlling the volumetric percentage of an internal gas of a seal box to a specific value. SOLUTION: A gas with a high permeation rate in a resin film 2, that is, a gas with a molecular weight of 44 or less excepting an air is introduced into an inner atmospheric seal box under the control of the flow rate of the gas from a gas inlet port 6, and the defect caused by the entrainment of bubbles is eliminated by setting the volumetric percentage of the gas to 50% or more. In addition, the gas and the air introduced through a decompression suction port 7 are sucked to control the internal pressure of the seal box 4 to a pressure range of 50-750Torr. If the degree of decompression is not more than 50Torr, the economic advantage is adversely affected, as the volume of a vacuum pump is increased. In this inner atmospheric seal box 4, the resin film 2 is laminated to a metal plate 1 by a pressure adhesion roll 3.