| 摘要 |
<p>PROBLEM TO BE SOLVED: To obtain a flow rate sensor in which thermal separation between heat-sensitive elements for heating and temperature compensation is attained efficiently while reducing the size and cost. SOLUTION: A circuit board 1 on which a signal processing circuit is formed is provided with a window 2 and heat-sensitive elements RH, RT for heating and temperature compensation are mounted across the window 2 on the front and rear surface of the circuit board 1.</p> |
