FILM FLATTENING METHOD IN SEMICONDUCTOR DEVICE,申请号JP19950229711-传众专利搜索

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发明名称	FILM FLATTENING METHOD IN SEMICONDUCTOR DEVICE
摘要
申请公布号	JPH0955364(A)	申请公布日期	1997.02.25
申请号	JP19950229711	申请日期	1995.08.15
申请人	SONY CORP	发明人	NAGASHIMA NAOKI
分类号	H01L21/76;H01L21/304;H01L21/306;H01L21/3105;H01L21/3205;(IPC1-7):H01L21/304;H01L21/320	主分类号	H01L21/76
代理机构		代理人
主权项
地址

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