| 摘要 |
<p>PROBLEM TO BE SOLVED: To obtain an active matrix liquid crystal panel consisting of a TFT array of a structure which may be produced by using backward staggered TFTs having the characteristics better than the characteristics of forward staggered TFTs and using only the stable process with a smaller number of exposure times. SOLUTION: Scanning lines 1, gate insulating films 10 and amorphous silicon films 11 consisting of the same patterns are formed in this order on a glass substrate 9. Drain electrodes 3 and source electrodes 4 formed of the same layer as the layer of transparent pixel electrodes 6 are disposed partly on these patterns and further, protective insulating films 12 are disposed thereon. Signal lines 2 and drain electrodes 3 disposed on the protective insulating films are connected through contact holes 5 arranged on the source and drain electrodes. The source electrodes and the pixel electrodes are connected by wirings 7.</p> |
