| 摘要 |
PROBLEM TO BE SOLVED: To enable the measurement which facilitates the assembly and adjustment of a measuring device and the setting of an object to be measured with a simple structure by radiating X rays through a slit member and reading luminous images of them through optical fibers by CCD image pickup element. SOLUTION: A slit member 3 with a slit of about 10μm in width is irradiated with X rays from an X-ray source. Once the X rays which have passed through the member 3 are made incident on intensifying paper as an X-ray-to-light converting member for an object 2 to be measured, sensitive paper emits light to form luminous images. These luminous images are read by CCD image pickup elements through optical fibers 42 placed close to or near a light-emitting face of the sensitive paper. Notably, it is preferable to cool the device 4 with a cooler 43 in advance in order to lower noises. The signals of an light-emitting source read by the device 4 are digitized by an analog-to-digital converting circuit 6 and then are transformed by a Fourier's transform circuit 8 to find the sharpness in a central processing unit 7. If necessary, in this process, the sharpness is corrected by deducting that of optical systems other than the object 2 in a MTF corrective circuit 9.
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