Electrodisplacive actuator array and method for the manufacture thereof

摘要

An array of electrodisplacive actuators is prepared by first forming on an electrodisplacive ceramic wafer a plurality of regularly spaced vertically directional trenches running parallel to each other, followed by forming a first conductive metallic layer thereon. A multiplicity of regularly spaced horizontally directional trenches running parallel to each other and running normal to the plurality of vertically directional trenches is then formed on the thus prepared ceramic wafer. A ceramic block having a top and a bottom surfaces is then formed by bonding together two ceramic wafers, prepared using the above described procedures. The top and the bottom surfaces of the ceramic block are removed until the first conductive metallic layer is exposed, and then a series of regularly spaced vertically directional grooves is formed thereon. Finally, a second conductive metallic layer is deposited on a bottom and side surfaces of each of the grooves to thereby form the array of electrodisplacive actuators.