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发明名称
EVALUATION METHOD FOR SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH0954133(A)
申请公布日期
1997.02.25
申请号
JP19950227090
申请日期
1995.08.11
申请人
NEC CORP
发明人
MATSUNO NORIO
分类号
G01R31/26;G01R31/27;G01R31/317;H01L21/66;(IPC1-7):G01R31/26
主分类号
G01R31/26
代理机构
代理人
主权项
地址
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