| 摘要 |
<p>PROBLEM TO BE SOLVED: To improve the yield by forming integrally a vibration part of an ultrathin part and a thick torus surrounding part supporting it and forming a groove around the thick torus surrounding part to easily slit individual vibrators. SOLUTION: Mnay recessed parts 11 are formed on one side of a crystal piezoelectric substrate 10 with etching, a maintenance use torus surrounding 12 is formed around them and grooves 13, 14 are formed as a grating to the circumferential ridges to surround the surrounding 12. The grooves 13, 14 may be formed by etching simultaneously when the recessed parts 11 are formed by machining, or after the recessed parts 11 are formed by machining, the grooves 13, 14 in a grating form are formed by machining so as to surround the thick circumferential ridge supporting the recessed parts 11. After the frequency adjustment, each vibrator is splitted easily by exerting a force from the opposite side of the grooves 13, 14 by a razor-like blade after frequency adjustment. Since no mechanical distortion is exerted to the vibrators, the frequency versus temperature characteristic of the vibrators is improved.</p> |
