发明名称 PELLICLE HOUSING CONTAINER
摘要 <p>PROBLEM TO BE SOLVED: To reduce the cost required for housing, transporting, etc., of pellicles of different sizes by providing a pellicle housing container capable of housing the pellicles of the different sizes without the occurrence of shaking and having excellent versatility. SOLUTION: This pellicle housing container is constituted to place a pellicle frame, which has a container body 10 integrally formed with a fitting part 11 at its peripheral edge and an imposing part at its inside bottom and a cap 20 formed with a tapered retaining part 22 at its inside surface and a fitting part fittable to the fitting part 11 of this container body 10 at its peripheral edge, on the imposing part and to press and hold this pellicle frame to the retaining part 22 of the cap 220 from above. The plural retaining parts 22a, 22b are curvilinearly formed to an approximately staircase shape on the cap 20 by varying their positions and the plural container bodies 10 varying in the sizes of the imposing parts are molded. One of plural kinds of the container bodies 10 is selected according to the size of the pellicle 30 and is used in combination with the cap 20.</p>
申请公布号 JPH0954422(A) 申请公布日期 1997.02.25
申请号 JP19950227003 申请日期 1995.08.14
申请人 SHIN ETSU POLYMER CO LTD 发明人 OKADA KAZUYA
分类号 B65D85/38;G03F1/62;H01L21/027 主分类号 B65D85/38
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