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发明名称
MICROSENSOR AND ITS MANUFACTURE
摘要
申请公布号
JPH0954058(A)
申请公布日期
1997.02.25
申请号
JP19950227544
申请日期
1995.08.11
申请人
TOKIN CORP
发明人
TAKEDA MITSUYUKI
分类号
G01K7/18;B81B1/00;B81C1/00;G01N27/12;G01N27/18;G01R33/02;H01L21/203;H01L21/306;H01L29/84;(IPC1-7):G01N27/12
主分类号
G01K7/18
代理机构
代理人
主权项
地址
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