| 摘要 |
PROBLEM TO BE SOLVED: To calibrate an analyzed value to a true value in sequence even if the analyzed value is observed apart from the true value by connecting a calibration gas system to a pipe connected to a vacuum device and a mass filter type gas analyzer. SOLUTION: This mass filter type gas analyzer (QMS) 101 is provided with a differential exhaust system connected to a film forming device 103 by a pipe 107 via a valve V1 104 having the fully opening/fully closing function. A calibration gas system 109 is connected to the pipe 107 connecting the valve V1 104 and QMS101. Gas is analyzed by the QMS101 while the valve V1 104 is invariably kept opened. In this analyzing method, (1): the film forming device 103 is exhausted to 3×10-<-7> Torr, (2): high-purity Ar gas is fed to a spatter device, DC power is applied, and an Al target is spattered, (3): the QMS101 is exhausted to 3×10<-10> Torr, and (4): the valve V1 104 is opened to change the pressure to 1×10<-4> Torr, impurities in the Ar gas atmosphere are measured by the QMS101, and the amount of H2 O is determined.
|
