| 摘要 |
PROBLEM TO BE SOLVED: To make a space between a scintillator and a photodetector uniform and improve uniformity of a detection sensitivity by regulating the space between the scintillator and photodetector by means of a spacer and filling a space part with an adhesive. SOLUTION: A space between a photodiode array (photodetector) 2 and a scintillator array 3 is regulated by thickness of a spacer 5. A resulting space part 6 is filled with a transparent adhesive 7 such as an epoxy adhesive or the like. In the thus-formed X-ray detector, X rays coming in (y) direction are changed to a light by the array 3, passing through the space part 6, and enter the array 2. Since the spacer 5 has the thickness (e.g. 20-40μm) sufficient to absorb warping or roughness allowance of faces of the arrays 2, 3, influences because of the unevenness in space of the arrays 2 and 3 due to the warping or rough faces are eased. Moreover, since the adhesive 7 fills the space without including air bubbles or vacuum bubbles, the light from the array 3 enters the array 2 uniformly, so that a uniform sensitivity distribution is obtained in any direction.
|
