METHOD FOR FORMING A THIN CARBON OVERCOAT IN A MAGNETIC RECORDING MEDIUM
摘要
A method for forming an overcoat having first and second layers in a magnetic recording medium is described. The first overcoat layer is deposited in a first sputtering chamber where the magnetic means for confining target plasma in the chamber are oriented to retain magnetic field confinement about the target surface and to produce magnetic field lines between directly confronting portions of the confronting sputtering targets. The second overcoat layer is deposited under a nitrogen-containing atmosphere.
申请公布号
WO9706529(A1)
申请公布日期
1997.02.20
申请号
WO1996US12863
申请日期
1996.08.06
申请人
HMT TECHNOLOGY CORPORATION
发明人
LAL, BRIJ, BIHARI;BOUREZ, ALLEN, J.;RUSSAK, MICHAEL, A.