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发明名称
Verfahren zur Herstellung von polykristallinen Siliziumkontakten
摘要
申请公布号
DE69028450(T2)
申请公布日期
1997.02.20
申请号
DE1990628450T
申请日期
1990.05.31
申请人
SGS-THOMSON MICROELECTRONICS, INC., CARROLLTON, TEX., US
发明人
SPINNER, CHARLES RALPH, DALLAS, TEXAS 78248, US;CHEN, FUSEN E., DALLAS, TEXAS 75287, US;LIOU, FU-TAI, CARROLLTON, TEXAS 75010, US
分类号
H01L21/3205;H01L21/28;H01L21/285;H01L21/768;H01L23/52;(IPC1-7):H01L21/283
主分类号
H01L21/3205
代理机构
代理人
主权项
地址
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