Device for coating a substrate by vaporisation of a rotary tubular target

摘要

In a device for coating a substrate (37) by vaporising the surface of a rotary tubular target (2) by means of electrical energy, magnets (12,13,32,33) produce a vaporisation zone extending in the longitudinal direction of the target (2). The magnets (12,13) are arranged outside the target (2) and transmit the magnetic field to the magnetically conductive pole shoes (3,4,5) inside the target (2) via narrow gaps (6,11). A magnetic flux conductor (7) arranged outside the target (2) in-line with the pole shoes (3,4,5) inside the target (2) has three parallel pole shoes (8,9,10) and magnets (12.13) on each side of the middle pole shoe (9), which lie with the same pole (14,15) against the middle pole shoe (9) and the opposite pole (16,17) against the outer pole shoes (8,10).