Elektrostatischer Substrathalter,申请号DE19916023995-传众专利搜索

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发明名称	Elektrostatischer Substrathalter
摘要
申请公布号	DE69123995(D1)	申请公布日期	1997.02.20
申请号	DE19916023995	申请日期	1991.04.11
申请人	COMMISSARIAT A L'ENERGIE ATOMIQUE, PARIS, FR	发明人	DAVIET, JEAN-FRANCOIS, F-74000 CRAN-GEVRIER, FR;JEUCH, PIERRE, F-38180 SEYSSINS, FR;PECCOUD, LOUISE, F-38640 CLAIX, FR;RENARD, PIERRE, F-38000 GRENOBLE, FR
分类号	H01L21/683;(IPC1-7):H01L21/00;H02N13/00	主分类号	H01L21/683
代理机构		代理人
主权项
地址

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