Passivierungsschichten zum Schutz funktionstragender Schichten von Bauelementen und Verfahren zu ihrer Herstellung

摘要

The invention relates to a passivation layer and a method for its production for protecting function-supporting layers of components, especially HTSL components, against contamination and/or chemical or physical alteration of these layers. The object of the invention, to specify a passivation layer of this kind which additionally makes possible the production of contact and/or conducting-track regions within itself, is achieved by a plasma-activated coating of the function-supporting layer(s) with a noble metal oxide or noble metal alloy oxide.