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发明名称
VACUUM DEPOSITION APPARATUS
摘要
申请公布号
RU2073744(C1)
申请公布日期
1997.02.20
申请号
RU19920014581
申请日期
1992.12.25
申请人
MOSKOVSKIJ GOSUDARSTVENNYJ INSTITUT ELEKTRONIKI I MATEMATIKI
发明人
IVASHOV EVGENIJ N;KONDRASHOV PAVEL E;SLEPTSOV VLADIMIR V;STEPANCHIKOV SERGEJ V
分类号
C23C14/35;(IPC1-7):C23C14/35
主分类号
C23C14/35
代理机构
代理人
主权项
地址
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