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发明名称
摘要
申请公布号
JP2582828(B2)
申请公布日期
1997.02.19
申请号
JP19880002562
申请日期
1988.01.11
申请人
TOKYO SHIBAURA ELECTRIC CO
发明人
MYAGI TAKESHI;SUDO TOSHIO
分类号
H01L23/50;H01L23/12;(IPC1-7):H01L23/50
主分类号
H01L23/50
代理机构
代理人
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