RECTANGULAR VACUUM-ARC PLASMA SOURCE,申请号EP19950917050-传众专利搜索

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发明名称	RECTANGULAR VACUUM-ARC PLASMA SOURCE
摘要
申请公布号	EP0758408(A1)	申请公布日期	1997.02.19
申请号	EP19950917050	申请日期	1995.04.25
申请人	VAPOR TECHNOLOGIES INC.	发明人	WELTY, RICHARD P.
分类号	C23C14/24;C23C14/22;C23C14/32;H01J37/32;(IPC1-7):C23C14/32;C23C14/54	主分类号	C23C14/24
代理机构		代理人
主权项
地址

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