| 摘要 |
PROBLEM TO BE SOLVED: To enlarge a moving stage. SOLUTION: The moving stage apparatus is provided with a first stage 1 carrying an object and linearly reciprocating in a first direction, a second stage 2 loading the first stage 1 and linearly reciprocating in a second direction intersecting with the first direction on a level block 5, a first mirror and a first interferometer 8 for measuring the moving amount of the object in the first direction and, a second mirror 9 and a second interferometer 10 for measuring the moving amount of the object in the second direction. The first mirror is installed at the first stage 1 perpendicularly to the first direction and, the second mirror 9 is fitted to the second stage 2 perpendicularly to the second direction. Moreover, the first interferometer 8 and second interferometer 10 are arranged on the second stage 2 and surface plate 5, respectively. |
