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发明名称
QUALITY EVALUATION METHOD FOR SILICON WAFER
摘要
申请公布号
JPH0951025(A)
申请公布日期
1997.02.18
申请号
JP19950202335
申请日期
1995.08.08
申请人
NIPPON STEEL CORP
发明人
DEAI HIROYUKI;IWASAKI TOSHIO
分类号
H01L21/66;(IPC1-7):H01L21/66
主分类号
H01L21/66
代理机构
代理人
主权项
地址
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