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发明名称
PRECISION CLEANING METHOD
摘要
申请公布号
JPH0947732(A)
申请公布日期
1997.02.18
申请号
JP19950200102
申请日期
1995.08.04
申请人
OLYMPUS OPTICAL CO LTD
发明人
TOMITANI MANABU;KOO KUNIHISA
分类号
B08B3/08;H01L21/304;(IPC1-7):B08B3/08
主分类号
B08B3/08
代理机构
代理人
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