| 摘要 |
PROBLEM TO BE SOLVED: To obtain a vacuum lamination device which can be applied as a device for manufacturing a solar cell module with a high productivity. SOLUTION: A cylindrical pipe 102 is formed in an annular body and a plurality of deaeration holes 105 are formed on the wall at the inner-periphery side of the annular body. The annular body is installed and fixed via a net arranged on a sheet-shaped base 10. The annular body constitutes a space part for performing lamination treatment while being covered with a lid member 107. When evacuating the space part, the lid member is sucked to the side of the base 101 but a path for deaeration for evacuation can be positively secured since a net exists between the lid member and the base 101, thus stably executing evacuation and improving the productivity for lamination treatment. |
