IMPROVED PROCESSING OF CERAMIC AND DEVICE THEREFOR

摘要

PROBLEM TO BE SOLVED: To form the electroconductive part of a fine pattern suppressing divergence and fuzziness as much as possible, by irradiating the surface of a ceramic material through a mask corresponding to a fixed pattern with an SR light beam B at a short wavelength having high luminance to eliminate O, N or C. SOLUTION: A ceramic material 5 is irradiated with an SR light beam B by driving an electron synchrotron radiation light emitting device 2 in a state of the ceramic material and a mask 6 held by a supporting device 7. In the irradiation, the positions of the ceramic material 5 and the mask 6 are controlled in terms of time and space by a position control device 8 to uniformly irradiate the necessary part of the ceramic material with the SR light beam B. Consequently, oxygen atom is eliminated by the reaction based on excitation of an inner-shell electron of an atom in the irradiated part to develop electroconductivity by forming a metallic state. The surface of the ceramic material 5 is provided with an electroconductive part 5a of a given pattern corresponding to the pattern of the mask 6.