| 摘要 |
A main scale 11 and an index scale 12 are arranged in parallel with each other so as to be relatively movable. A light source 10 for irradiating collimated light on the main scale 11 is provided above the main scale 11. A light detecting devices 13a and 13b for detecting the amount of light which pass trough the index scale 12 are provided below the index scale 12. The main scale 11 has an uniform grating which consist of transmitting portions 14 and non-transmitting portions 15 which are formed with a uniform width and alternately arranged by uniform pitch P. The index scale 12 has non-uniform grating portions 12a and 12b whose phase are mutually shifted 90 degrees. Transmitting portions 16 and non-transmitting portions 17 of the non-uniform grating portions are arranged at the same pitch as the main scale 11. Each width of the non-transmitting portions 17 is equal to each width of sliced portions of a sine waveform sliced by 10 slice levels, the sine waveform is represented bottom-to-bottom and whose wavelength is equal to one pitch of the uniform grating. The non-uniform gratings 12a and 12b substantially work as the sine wave gratings, so that an output signal excluding the harmonic components distortion can be obtained.
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