Chemical vapor deposition-produced silicon carbide having improved properties

摘要

beta -silicon carbide which is optically transmitting in the visible and infrared regions is produced by chemical vapor deposition. Deposition conditions are temperatures within a 1400 DEG -1500 DEG C. range, pressure 50 torr or less, H2/methyltrichlorosilane molar ratios of 4-30 and a deposition rate of 1 mu m or less.