| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a method for adsorption and separation by which a product gas with a high concn. and a narrow allowable width of deviation can be surely recovered. SOLUTION: In a method for adsorption and separation of a specified gas by means of a PSA method which has at least an adsorption process, a parallel flow purge process with the product gas, a vacuum desorption process and a pressure elevating process, the concn. of a specified component in an exhaust gas from an adsorption tower in the parallel flow purge process is measured and the amt. of feeding of a raw material gas and the amt. of recovery of the vacuum desorption gas are adjusted so as to bring the measured value in a specified range of concn. and when the measured value reaches the upper limit value of the aimed range of concn., the parallel flow purge process is switched to the vacuum desorption process.</p> |
