EB TESTER FOR LIMITING SCANNING RANGE OF ELECTRON BEAM,申请号JP19950219710-传众专利搜索

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发明名称	EB TESTER FOR LIMITING SCANNING RANGE OF ELECTRON BEAM
摘要
申请公布号	JPH0949865(A)	申请公布日期	1997.02.18
申请号	JP19950219710	申请日期	1995.08.04
申请人	NEC CORP	发明人	KOYABU KUNIHIRO
分类号	G01R31/28;H01L21/66;(IPC1-7):G01R31/28	主分类号	G01R31/28
代理机构		代理人
主权项
地址

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